The Department of Electrical and Electronic Engineering at Xi'an Jiaotong-Liverpool University (XJTLU) recently opened its Micro-Nano Fabrication Lab to all undergraduate students doing course experiments and graduation designs.

The lab is dedicated to scientific research and teaching of micro-nano and nano fabrication technology, semiconductor device, advanced electrical materials, and super large IC. Consisting of a class-1,000 and a class-10,000 cleanroom with total area of 200 square meters and a 160-square-meter test room, the lab is equipped with ALD (atomic layer deposition) and B1500A semiconductor device parameter analyzer, capable of producing and analyzing film materials with the thickness of less than 0.5 nanometers.